Design of Radial Line Slot Antennas at 8.3 GHz for Large Area Uniform Plasma Generation
Design of Radial Line Slot Antennas at 8.3 GHz for Large Area Uniform Plasma Generation
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用于大面积均匀等离子体生成的 8.3 GHz 径向线缝隙天线设计
DOI：
10.1143/jjap.38.2082
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发表时间：
1999
影响因子：
1.5
通讯作者：
T. Ohmi
中科院分区：
文献类型：
--
作者：
Tetsuya Yamamoto;Nguyen Thang Chien;M. Ando;N. Goto;M. Hirayama;T. Ohmi
设计了一种直径为400 mm的径向线缝隙天线(RLSA)，用于8.3 GHz的等离子体源，作为工艺空间狭窄的大面积高密度等离子体源的候选天线。设计了一种在孔径上同心排列成对槽的RLSA，并将其应用于不需要磁场的等离子体处理系统中。首先，对无等离子体情况下的电性能进行了预测和测试。实现了合理的电压驻波比(VSWR)和均匀的天线口径场强分布。应用于等离子体测试设备，通过石英玻璃窗口在天线口径附近产生了大于1×1012 cm-3的高电子密度和较均匀的(±2%)电子温度分布。演示了通过阻塞天线孔径来控制离子通量分布的均匀性。
A radial line slot antenna (RLSA) 400 mm in diameter is designed for a plasma source at 8.3 GHz as a candidate for a large area high density plasma source with a narrow process space. A RLSA with paired slots arrayed concentrically on its aperture is designed and applied to a plasma process system which does not need a magnetic field. First, electrical performance without plasma is predicted and measured. Reasonable voltage standing wave ratio (VSWR) as well as uniform field distribution on the antenna aperture is realized. As applied to the plasma test equipment, high electron density of more than 1×1012 cm-3 as well as fairly uniform (±2%) distribution at a low electron temperature is produced in the vicinity of the antenna aperture through a quartz glass window. Control of uniformity in ion flux profiles by blocking the antenna aperture is demonstrated.