Implementation of line-scan dispersive interferometry for defect detection
Implementation of line-scan dispersive interferometry for defect detection
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发表时间：
2016-05
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通讯作者：
Dawei Tang;F. Gao;Xiang Jiang
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作者：
Dawei Tang;F. Gao;Xiang Jiang
表面保证是先进制造技术（如R2R技术）的主要关注点之一。阻挡膜上存在的不期望的缺陷使得R2R产品遭受低效率和短寿命。为了提高产品的性能和产量，需要一种能够在生产线中对功能表面进行在线计量的检测系统来优化制造过程。本文报道了一种瞬时线扫描色散干涉法，它具有足够的分辨率和纳米级的测量重复性，以检测柔性光伏薄膜上的缺陷。无需任何机械扫描，并在一次拍摄中获得表面轮廓，这使得该设置能够最大限度地减少环境影响，并可用于车间。使用基于FFT的算法分析捕获的光谱干涉图，并且可以使用图形处理单元（GPU）通过数据并行来加速处理时间。通过测量由工艺创新中心（CPI）提供的聚萘二甲酸乙二醇酯（PEN）薄膜，对所开发的系统的性能进行了实验评估。本文介绍了实验的细节和结果。
Surface assurance is one of the main concerns for advanced manufacturing technologies such as Roll-to-Roll (R2R) technique. The undesired defects present on the barrier films make R2R products suffer from a low efficiency and short life span. In order to enhance the performance and the yield of the products, an inspection system enabling in-line metrology of functional surfaces in production lines is desirable to optimise the manufacturing processes. This paper reports an instantaneous line-scan dispersive interferometry which has sufficient resolutions and nano-scale measurement repeatability to detect defects on flexible PV films. Free from any mechanical scanning and obtaining a surface profile in a single shot allows this setup to minimise environmental effects and to be used on the shop floor. The captured spectral interferogram is analysed using a FFT based algorithm, and the process time can be accelerated through data parallelism using a graphics processing unit (GPU). The performance of the developed system was evaluated experimentally by measuring the polyethylene naphthalate (PEN) films provided by the Centre for Process Innovation (CPI). The experimental details and results are presented in this paper.