Focus-position sensing using laser speckle.
Focus-position sensing using laser speckle.
复制标题
使用激光散斑进行焦点位置传感。
作者：
J. McLaughlin
研究了光束聚焦在非镜面附近产生的激光散斑，并推导了散斑速度与非镜面焦点距离之间的关系。对这种关系进行了经验验证，并证明了确定表面相对于焦点位置的能力，其精度在瑞利极限的0.02以内，表面与焦点有很大距离。
The laser speckle resulting from a beam focused in proximity to a nonspecular surface has been examined, and a relationship between the speckle velocity and the distance from focus of the nonspecular surface is derived. An empirical verification of the relationship was performed, and the ability to determine surface position with respect to focus was demonstrated to an accuracy within 0.02 of the Rayleigh limit with the surface substantial distances from focus.