Polymer-core conductor approaches for RF MEMS
Polymer-core conductor approaches for RF MEMS
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DOI：
10.1109/jmems.2005.851804
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发表时间：
2005-10
影响因子：
2.7
通讯作者：
Yong-Kyu Yoon;Jin-Woo Park;M. Allen
中科院分区：
文献类型：
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作者：
Yong-Kyu Yoon;Jin-Woo Park;M. Allen
在许多射频（RF）微机电系统（MEMS）应用中，由于趋肤效应，电流被限制在导体的最外部分。由涂有金属的聚合物芯组成的导体，即所谓的聚合物芯导体，适合考虑用于这些应用，并且在许多情况下比其固体金属芯对应物更容易制造。报道了使用SU-8环氧树脂芯图案化和随后的金属电沉积来实现聚合物芯导体。SU-8核心方法允许相对简单地形成用于电感器侧壁的极高纵横比列。此外，一个SU-8桥的制作技术已经实现了使用一个双曝光和单显影方案。桥的厚度已被其特征在于作为一个功能的光剂量和后烘烤时间在烤箱中。三维，高纵横比，高Q值，螺线管型RF电感器的制造和测试，以证明聚合物芯导体方法的RF应用的可行性。SU-8主干结构上的单个无孔金属化提供了电感器的完整导电路径。高度为900 /spl mu/m且横向延伸为600 /spl mu/m的单匝电感器在2.6GHz下示出84的最大Q因子和1.17nH的电感。
In many radio frequency (RF) microelectromechanical systems (MEMS) applications, currents are confined to the outermost portions of conductors due to the skin effect. Conductors consisting of polymer cores coated with metal, the so-called polymer-core conductor, are appropriate to consider for these applications, and in many instances are easier to fabricate than their solid-metal-core counterparts. Implementation of polymer-core conductors using an SU-8 epoxy-core patterning and subsequent metal electrodeposition is reported. The SU-8 core approach allows for relatively simple formation of extremely high-aspect-ratio columns for inductor sidewalls. In addition, an SU-8 bridge fabrication technique has been realized using a double exposure and single develop scheme. The bridge thickness has been characterized as a function of the optical dose and the post bake time in an oven. Three-dimensional, high-aspect-ratio, high Q-factor, solenoid-type RF inductors are fabricated and tested to demonstrate the feasibility of the polymer-core conductor approach for RF applications. A single, vialess metallization over SU-8 back-bone structure provides the complete conducting paths of the inductor. A single turn inductor that is 900 /spl mu/m in height and 600 /spl mu/m in lateral extension shows a maximum Q-factor of 84 and an inductance of 1.17 nH at 2.6 GHz.