Micro and nano machining by electro-physical and chemical processes
Micro and nano machining by electro-physical and chemical processes
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DOI：
10.1016/j.cirp.2006.10.002
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发表时间：
2006-01-01
影响因子：
4.1
通讯作者：
DeSilva, A.
中科院分区：
文献类型：
--
作者：
Rajurkar, K. P.;Levy, G.;DeSilva, A.
在电子、医疗和航空等不同行业，对微特征、组件和产品的需求正在迅速增加。产品小型化要求创新的制造方法。现有的各种宏观制造工艺正在被改进以进行微观制造。电物理和化学微加工工艺以其特殊的材料去除机制在该领域发挥着重要作用。本文介绍了电物理和化学微加工技术在世界范围内的发展和现状。对配套技术如标准化、计量、设备设计等问题进行了简要评价。非技术问题，包括环境影响和教育也进行了讨论。
The need for micro-features, components and products is rapidly increasing in diverse industries such as electronics, medical and aviation. Product miniaturization demands innovative manufacturing methods. Various existing macro-manufacturing processes are being modified to perform micro-scale manufacturing. Electro-physical and chemical micromachining processes play important role in this field due to their special material removal mechanisms. This paper reports the worldwide technical developments and state-of-the-art of electro-physical and chemical micromachining processes. Issues related to the supporting technologies such as standardization, metrology and equipment design are briefly assessed. Non-technological issues including environmental effects and education are also discussed.