A Novel Mems 3-Axis Thermal Accelerometer with 5-Wire Structure Using Planar Stacking Method
A Novel Mems 3-Axis Thermal Accelerometer with 5-Wire Structure Using Planar Stacking Method
复制标题
采用平面堆叠方法的新型 5 线结构 Mems 3 轴热加速度计
DOI：
10.1109/transducers.2019.8808669
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
Y. Hao
中科院分区：
文献类型：
--
作者：
Zhe Li;Wenhan Chang;Shoule Sun;Chengchen Gao;Y. Hao
本文首次提出了一种新型MEMS三轴热加速度计。采用平面堆叠法制作了两个相互垂直的五线结构。与其它三轴热加速度计相比，该加速度计具有制作工艺简单、信号处理电路简单、敏感方向正交、灵敏度基本相同等优点。对于其中一种五线结构，两个正交方向的灵敏度分别为16.1mV/g和18.4mV/g。该加速度计在20 Hz的加速度范围内具有良好的线性度。
This paper proposed a novel MEMS 3-axis thermal accelerometer for the first time. Two five-wire structures perpendicular to each other are fabricated using planar stacking method. Compared with other 3-axis thermal accelerometers, this accelerometer has simpler fabrication process and signal processing circuit, and the sensitive directions are orthogonal with almost the same sensitivities. For one of the five-wire structures, the sensitivities of the two orthogonal directions are 16.1mV/g and 18.4mV/g respectively. This accelerometer shows good linearity for a range about 0-6g acceleration at 20Hz.