Slit shaped microwave induced atmospheric pressure plasma based on a parallel plate transmission line resonator
Slit shaped microwave induced atmospheric pressure plasma based on a parallel plate transmission line resonator
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DOI：
10.1088/0022-3727/44/43/435201
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发表时间：
2011-11
期刊：
影响因子：
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通讯作者：
S. Kang;Y. Seo;H. Lee;Aman-ur-Rehman;G. C. Kim;J. Lee
中科院分区：
文献类型：
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作者：
S. Kang;Y. Seo;H. Lee;Aman-ur-Rehman;G. C. Kim;J. Lee
基于平行板传输线谐振器原理，开发了一种新型微波激发常压等离子体源，用于皮肤治疗和伤口愈合等生物医学应用中的大面积治疗。 20 mm 宽度的稳定等离子体由以 700 MHz 频率和 0.9 slm 气体流速运行的小型微波电源维持。通过将计算的反射系数与测量的反射系数拟合来估计该等离子体源的等离子体阻抗和等离子体密度。随着输入功率的增加，估计的等离子体阻抗呈现出减小的趋势，而估计的等离子体密度则呈现出增加的趋势。等离子体均匀性通过温度和光发射分布测量来确认。等离子体温度维持在 40°C 以下，并且在整个等离子体区域检测到大量的活性物质，这些活性物质是细菌灭活的重要因素。这种新开发的装置的大面积处理能力通过大肠杆菌灭活实验得到验证。灭菌实验显示，等离子处理时间10秒，细菌杀灭痕迹达25毫米。
A new type of microwave-excited atmospheric pressure plasma source, based on the principle of parallel plate transmission line resonator, is developed for the treatment of large areas in biomedical applications such as skin treatment and wound healing. A stable plasma of 20 mm width is sustained by a small microwave power source operated at a frequency of 700 MHz and a gas flow rate of 0.9 slm. Plasma impedance and plasma density of this plasma source are estimated by fitting the calculated reflection coefficient to the measured one. The estimated plasma impedance shows a decreasing trend while estimated plasma density shows an increasing trend with the increase in the input power. Plasma uniformity is confirmed by temperature and optical emission distribution measurements. Plasma temperature is sustained at less than 40 °C and abundant amounts of reactive species, which are important agents for bacteria inactivation, are detected over the entire plasma region. Large area treatment ability of this newly developed device is verified through bacteria inactivation experiment using E. coli. Sterilization experiment shows a large bacterial killing mark of 25 mm for a plasma treatment time of 10 s.