Transition from wire formation to island formation in thermal agglomeration of a (111) silicon-on-insulator layer
Transition from wire formation to island formation in thermal agglomeration of a (111) silicon-on-insulator layer
复制标题
(111) 绝缘体上硅层热团聚过程中从线形成到岛形成的转变
DOI:
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发表时间:
2006
期刊:
影响因子:
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通讯作者:
Michiharu Tabe
中科院分区:
文献类型:
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作者:
Zainal A.Burhanudin;Ratno Nuryadi;Yasuhiko Ishikawa;Michiharu Tabe