Numerical simulation of an RF inductively coupled plasma for functional enhancement by seeding vaporized alkali metal
Numerical simulation of an RF inductively coupled plasma for functional enhancement by seeding vaporized alkali metal
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通过播种汽化碱金属来增强功能的射频感应耦合等离子体的数值模拟
DOI：
10.1051/epjap:2002034
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发表时间：
2002
影响因子：
1
通讯作者：
M. Shigeta
中科院分区：
文献类型：
--
作者：
H. Nishiyama;M. Shigeta
通过注入低电离势的汽化碱金属，可以增强等离子流的导电、导热和化学反应等功能。在本研究中，对通过注入少量汽化碱金属来增强其功能的射频感应耦合等离子体进行了数值模拟。通过与流动结构和电磁效应相关，阐明了引种、注入流量和施加的线圈频率对等离子体特性的影响。
The functions of the plasma flow such as electrical conductivity, thermal conduction and chemical reaction can be enhanced by seeding vaporized alkali metal with low ionization potential. In the present study, numerical simulation is conducted for the radio frequency inductively coupled plasma of which functions are enhanced by seeding a small amount of vaporized alkali metal. The effects of seeding, injection flow rate and applied coil frequency on the plasma characteristics are clarified by relating to the flow structure and electromagnetic effect.