SrHfO3 as gate dielectric for future CMOS technology

SrHfO3 as gate dielectric for future CMOS technology
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DOI:
10.1016/j.mee.2007.04.029
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发表时间:
2007-09
影响因子:
2.3
通讯作者:
C. Rossel;M. Sousa;C. Marchiori;J. Fompeyrine;D. Webb;D. Caimi;B. Mereu;A. Ispas;J. Locquet-J.-Locq
C. Rossel;M. Sousa;C. Marchiori;J. Fompeyrine;D. Webb;D. Caimi;B. Mereu;A. Ispas;J. Locquet-J.-Locq
中科院分区:
工程技术3区
文献类型:
--
作者:
C. Rossel;M. Sousa;C. Marchiori;J. Fompeyrine;D. Webb;D. Caimi;B. Mereu;A. Ispas;J. Locquet-J.-Locq

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