Comparison of carbon doping of InGaAs and GaAs by CBr4 using hydrogen or nitrogen as carrier gas in LP-MOVPE
Comparison of carbon doping of InGaAs and GaAs by CBr4 using hydrogen or nitrogen as carrier gas in LP-MOVPE
复制标题
LP-MOVPE 中氢气或氮气作为载气的 CBr4 碳掺杂 InGaAs 和 GaAs 的比较
DOI:
10.1016/s0022-0248(98)00903-8
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发表时间:
1999
影响因子:
1.8
通讯作者:
G. Landgren
中科院分区:
文献类型:
--
作者:
D. Keiper;R. Westphalen;G. Landgren