SOFT LITHOGRAPHY COMPATIBLE FABRICATION OF PARALLEL ELECTRODES IN MICROFLUIDIC DEVICES
SOFT LITHOGRAPHY COMPATIBLE FABRICATION OF PARALLEL ELECTRODES IN MICROFLUIDIC DEVICES
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发表时间：
2018-11
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通讯作者：
Ruxiu Liu;Chia-Heng Chu;Mert Boya;Ozgun Civelekoglu;Hang Chen;A. F. Sarioglu
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作者：
Ruxiu Liu;Chia-Heng Chu;Mert Boya;Ozgun Civelekoglu;Hang Chen;A. F. Sarioglu
本文报道了一种将由平行电极组成的电传感器集成到使用软光刻制造的微流体设备中的制造过程。我们的工艺有助于将电极之一放置在微流体通道的塑料壁上，同时将反电极留在玻璃基板上。我们的技术以最小的制造复杂性，不仅比传统的共面电极产生更均匀的电场，而且由于具有更大的布局灵活性，更适合在微流体设备中构建复杂的电传感器网络。
This paper reports a fabrication process to integrate electrical sensors comprised of parallel electrodes into microfluidic devices that are manufactured using soft lithography. Our process facilitates placement of one of the electrodes over the plastic walls of the microfluidic channel, while leaving the counter-electrode on the glass substrate. With minimal fabrication complexity, our technique not only produces more uniform electric fields than conventional coplanar electrodes, but also is more suitable for the construction of complex electrical sensor networks in microfluidic devices due to greater layout flexibility.