Single-Crystal Epitaxial Thin Films of the Isotropic Metallic Oxides Sr1-xCaxRuO3 (0 le x le 1).

Single-Crystal Epitaxial Thin Films of the Isotropic Metallic Oxides Sr1-xCaxRuO3 (0 le x le 1).
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各向同性金属氧化物 Sr1-xCaxRuO3 的单晶外延薄膜 (0 le x le 1)。

DOI:
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发表时间:
1992
期刊:
影响因子:
56.9
通讯作者:
W. F. Peck
W. F. Peck
中科院分区:
综合性期刊1区
文献类型:
--
作者:
C. Eom;R. Cava;R. Fleming;J. Phillips;R. Vandover;J. H. Marshall;J. Hsu;J. Krajewski;W. F. Peck

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采用90度离轴溅射法在斜切的SrTiO(3)(100)衬底上原位生长了各向同性金属氧化物Sr1-xCaxRuO(3)(0=x</=1)单晶外延薄膜。这些薄膜具有低的各向同性电阻率、优异的化学和热稳定性、良好的表面平整度和高的结晶质量。此外,可以通过简单地改变锶/钙比来改变晶格参数和磁性。这些外延薄膜及其与其他氧化物材料的多层结构可用于制造超导、铁电、磁光和电光器件。
Single-crystal epitaxial thin films of the isotropic metallic oxides Sr1-xCaxRuO(3) (0 </= x </= 1) were grown on miscut SrTiO(3)(100) substrates in situ by 90 degrees off-axis sputtering. These thin films exhibit low isotropic resistivities, excellent chemical and thermal stability, good surface smoothness, and high crystalline quality. Furthermore, the lattice parameters and magnetic properties can be varied by simply changing the strontium/calcium ratio. These epitaxial thin films, and their multilayer structures with other oxide materials, can be used for the fabrication of superconducting, ferroelectric, magneto-optic, and electro-optic devices.