Design of large deflection electrostatic actuators
Design of large deflection electrostatic actuators
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DOI：
10.1109/jmems.2003.811750
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发表时间：
2003-06-01
影响因子：
2.7
通讯作者：
Kenny, TW
中科院分区：
文献类型：
--
作者：
Grade, JD;Jerman, H;Kenny, TW
静电梳齿驱动执行器专为需要在 1 毫秒内位移高达 150 µm 的应用而设计。执行器的非线性模型将谐振频率和最大稳定偏转与执行器尺寸相关联。在深反应离子蚀刻 (DRIE)、单晶硅、梳状驱动执行器上进行的一系列实验证实了该模型的有效性。实施了四项执行器设计改进。首先，由两个而不是四个折叠梁和一个 U 形梭组成的折叠挠性悬架允许将执行器区域切成两半，而不会降低其性能。其次，梳齿的长度设计成线性增加，以将侧面不稳定性降低两倍。第三，折叠挠性悬架以初始弯曲配置制造，提高了悬架刚度比，并将侧面不稳定性降低了 30 倍。最后，使用发射和捕获驱动方案实现了额外的驱动范围，其中允许驱动器在完全向前偏转后向后摆动；使用梳状组的背面作为高力平行板致动器来捕获和固定航天飞机。
Electrostatic, comb-drive actuators have been designed for applications requiring displacements of up to 150 mum in less than 1 ms. A nonlinear model of the actuator relates the resonant frequency and the maximum stable deflection to the actuator dimensions. A suite of experiments that were carried out on deep reactive ion etched (DRIE), single-crystal silicon, comb-drive actuators confirm the validity of the model. Four actuator design improvements were implemented. First, a folded-flexure suspension consisting of two folded beams rather than four and a U-shaped shuttle allowed the actuator area to be cut in half without degrading its performance. Second, the comb teeth were designed with linearly increasing lengths to reduce side instability by a factor of two. Third, the folded-flexure suspensions were fabricated in an initially bent configuration, improving the suspension stiffness ratio and reducing side instability by an additional factor of 30. Finally, additional actuation range was achieved using a launch and capture actuation scheme in which the actuator was allowed to swing backward after full forward deflection; the shuttle was captured and held using the backs of the comb banks as high-force, parallel-plate actuators.