Novel transparent hybrid polymer working stamp for UV-imprinting
Novel transparent hybrid polymer working stamp for UV-imprinting
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DOI：
10.1016/j.mee.2008.12.088
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发表时间：
2009-04-01
影响因子：
2.3
通讯作者：
Schoeftner, Rainer
中科院分区：
文献类型：
--
作者：
Klukowska, Anna;Kolander, Anett;Schoeftner, Rainer
透明印章是UV印记不可或缺的重要组成部分。耗时的石英印章制造增加了这项技术的价格。在这项工作中，我们展示了一种由新型杂化聚合物体系制成的热稳定的透明印记印章。作为一种低成本、高效率的选择，杂化聚合物印章有助于纳米印迹技术的接受和应用。通过使用可UV图案的无机-有机杂化聚合物石英印章，可能在UV压印过程中变得完全多余，因为也可以使用不透明的硅母版印章来制造透明的工作印章。(C)2009爱思唯尔B.V.保留所有权利。
Transparent stamps are an integral and crucial part of the UV-imprinting. Time consuming fabrication of quartz stamps increases the price of the technology. In the presented work a thermally stable transparent imprint stamp made of a novel hybrid polymer system is demonstrated. As a low-cost and highly efficient alternative the hybrid polymer stamp contributes to the acceptance and application of the nanoimprint technology. By using the UV-patternable inorganic-organic hybrid polymer quartz stamps might become superfluous in the UV-imprint process entirely, because transparent working stamps can be manufactured also with use of opaque silicon master stamps. (C) 2009 Elsevier B.V. All rights reserved.