Ultrasonic Micro-Spectroscopy Characterization of ZnO and AlN Single Crystals
Ultrasonic Micro-Spectroscopy Characterization of ZnO and AlN Single Crystals
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发表时间：
2008
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通讯作者：
J. Kushibiki;Y. Ohashi;M. Arakawa;Tomoya Tanaka
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作者：
J. Kushibiki;Y. Ohashi;M. Arakawa;Tomoya Tanaka
我们将超声波显微光谱 (UMS) 技术的应用扩展到 ZnO 和 AlN 压电六方晶体的表征。通过测量纵波、横波以及泄漏表面声波 (LSAW) 的速度，评估了通过水热法生长的 (001)、(100) 和 (101) ZnO 晶体板的三个样本以及通过物理气相传输法生长的 (001) 和 (100) AlN 晶体板的两个样本的基本声学特性。我们开发了一种确定其声学物理常数的方法，并获得了比已发布的常数更准确的常数。
We extended applications of our ultrasonic microspectroscopy (UMS) technology to characterization of piezoelectric hexagonal crystals of ZnO and AlN. Basic acoustic properties of three specimens of (001), (100), and (101) ZnO crystal plates, grown by the hydrothermal method, and two specimens of (001) and (100) AlN crystal plates, grown by the physical vapor transport method, were evaluated by measuring the velocities of longitudinal and shear waves and leaky surface acoustic waves (LSAWs). We developed a method of determining their acoustical physical constants and obtained the more accurate constants than the published constants.