N.Takada, D.Hayashi, K.Sasaki and K.Kadota: "Diagnostics of fluorine negative ions by laser photodetachment combined with a heated probe in high-density CF_4 plasmas" Jpn.J.Appl.Phys.36(12B). L1702-L1705 (1997)
N.Takada, D.Hayashi, K.Sasaki and K.Kadota: "Diagnostics of fluorine negative ions by laser photodetachment combined with a heated probe in high-density CF_4 plasmas" Jpn.J.Appl.Phys.36(12B). L1702-L1705 (1997)
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N.Takada、D.Hayashi、K.Sasaki 和 K.Kadota:“通过激光光分离结合高密度 CF_4 等离子体中的加热探针诊断氟负离子”Jpn.J.Appl.Phys.36(12B)。
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