Production of microwave plasma in narrow cross sectional tubes: Effect of the shape of cross section
Production of microwave plasma in narrow cross sectional tubes: Effect of the shape of cross section
复制标题
在窄截面管中产生微波等离子体：截面形状的影响
DOI：
10.1063/1.1149914
复制
发表时间：
1999
影响因子：
1.6
通讯作者：
H. Amemiya
中科院分区：
文献类型：
--
作者：
S. Bhattacharjee;H. Amemiya
微波等离子体是在截面小于截止值的导电管中产生的。2.45 GHz的波垂直于由围绕管的永磁体形成的多尖磁场发射。圆形和方形截面管进行测试。在10 - 4 Torr的范围内，功率为200-360 W时，可以获得密度为（0.8-2.0）×1011 cm-3的过密等离子体。电子温度为6-12 eV。在相同的实验条件下，圆形截面的等离子体密度和电子温度较高。
A microwave plasma is produced in a conducting tube with a cross section smaller than the cutoff value. Waves of 2.45 GHz are launched perpendicularly to the multicusp magnetic field formed by permanent magnets surrounding the tube. Circular and square cross sectional tubes are tested. Overdense plasmas with a density of (0.8–2.0)×1011 cm−3 are obtained in the range of 10−4 Torr for powers of 200–360 W. The electron temperature is 6–12 eV. Under the same experimental conditions, the plasma density and the electron temperature are higher for the circular cross section.