Preparation and Characterization of Epitaxial LiNbO3 Thin Films by Metal-Organic Chemical Vapor Deposition
Preparation and Characterization of Epitaxial LiNbO3 Thin Films by Metal-Organic Chemical Vapor Deposition
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金属有机化学气相沉积外延LiNbO3薄膜的制备及表征
DOI：
10.1143/jjap.38.5437
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发表时间：
1999
影响因子：
1.5
通讯作者：
Y. Sakabe
中科院分区：
文献类型：
--
作者：
K. Shiratsuyu;A. Sakurai;Katsuhiko Tanaka;Y. Sakabe
采用金属有机化学气相沉积（MOCVD）技术，以二新戊酰甲烷锂[Li（NO3）]和五乙醇铌[Nb（O-C2 H5）5]为前驱体，在蓝宝石衬底上制备了LiNbO 3薄膜。在（001）和（012）蓝宝石衬底上制备了LiNbO 3薄膜，用X射线衍射和极图分析研究了薄膜的晶体结构。在（001）蓝宝石衬底上沉积的LiNbO 3薄膜具有较强的（001）取向性，并具有孪晶结构，而在（012）蓝宝石衬底上沉积的LiNbO 3薄膜具有较高的（100）取向性。（001）取向和（100）取向LiNbO 3薄膜的X射线摇摆曲线的半高宽（FWHM）分别为0.16°和0.21°。场发射扫描电子显微镜（FE-SEM）分析表明，高度（100）取向的LiNbO 3薄膜具有狭长晶粒的独特形貌。晶粒在（012）蓝宝石衬底上平面内排列，并且LiNbO 3膜的c轴平行于晶粒的短轴。
LiNbO3 thin films were prepared on sapphire substrates by the metal-organic chemical vapor deposition (MOCVD) technique, using lithium dipivaloylmethanate [Li(DPM)] and niobium pentaethoxide [Nb(O–C2H5)5] precursors. LiNbO3 films were deposited on (001) and (012) sapphire substrates and their crystalline structures were investigated by X-ray diffraction and pole figure analyses. The LiNbO3 films deposited on (001) sapphire substrates showed strong (001) orientation involving twin structures, and highly (100)-oriented films were obtained on the (012) sapphire substrates. The full width at half maximum (FWHM) of the X-ray rocking curves of (001)-oriented and (100)-oriented LiNbO3 films were, respectively, 0.16° and 0.21°. Field emission scanning electron microscope (FE-SEM) analysis showed that highly (100)-oriented LiNbO3 films had unique morphologies with long and narrow grains. The grains align in plane on the (012) sapphire substrate, and the c-axis of the LiNbO3 film is parallel to the short axis of the grains.