Magnetic microactuation of torsional polysilicon structures
Magnetic microactuation of torsional polysilicon structures
复制标题
DOI：
10.1016/0924-4247(96)01138-7
复制
发表时间：
1996-05-01
影响因子：
4.6
通讯作者：
Muller, RS
中科院分区：
文献类型：
--
作者：
Judy, JW;Muller, RS
一种应用于扭转微结构的利用磁性薄膜和多晶硅弯曲的微致动器技术。这些结构是在批量制造过程中构建的，该过程将电镀与传统的IC光刻、材料和设备相结合。由430 μ m × 130 μ m × 15 μ m的镍-铁板制成的微致动反射镜连接到一对400 μ m × 2.2 μ m × 2.2 μ m的多晶硅扭转梁上，该微致动反射镜已经旋转超过90度离开晶片平面，并且以大于3.0nN·m的扭矩致动。扭转挠曲结构将运动约束为绕单个轴线的旋转，这对于许多颤噪应用（例如，射束斩波、扫描和操纵）。
A microactuator technology utilizing magnetic thin films and polysilicon flexures in applied to torsional microstructures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430 mu m X 130 mu m X 15 mu m nickel-iron plate attached to a pair of 400 mu m X 2.2 mu m X 2.2 mu m polysilicon torsional beams has been rotated more than 90 degrees out of the plane of the wafer and actuated with a torque greater than 3.0 nN m. The torsional flexure structure constrains motion to rotation about a single axis, which can be an advantage for a number of microphonic applications (e.g., beam chopping, scanning, and steering).