Microstructure and electrical conductivity of epitaxial CaRuO3 thin films prepared on (001), (110) and (111) SrTiO3 substrates by laser ablation
Microstructure and electrical conductivity of epitaxial CaRuO3 thin films prepared on (001), (110) and (111) SrTiO3 substrates by laser ablation
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DOI：
10.2109/jcersj2.115.683
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发表时间：
2007-11-01
影响因子：
1.1
通讯作者：
Goto, Takashi
中科院分区：
文献类型：
--
作者：
Ito, Akihiko;Masumoto, Hiroshi;Goto, Takashi
采用激光烧蚀法在SrTiO 3（STO）单晶衬底上制备了CaRuO 3（CRO）薄膜，研究了其微观结构以及晶格失配对电导率的影响。在氧分压为13 Pa、衬底温度为973 K的条件下，分别在（001）、（110）和（111）STO衬底上外延生长了（001）、（110）和（111）面内取向的伪立方结构CRO薄膜。外延（001）薄膜表面平整光滑，具有台阶和台阶结构，而（110）CRO薄膜表面具有小平面的类锯齿结构。（111）CRO薄膜具有粗糙的台阶结构和三角织构。CRO的晶格膨胀会导致电导率的降低。外延的（111）CRO薄膜与（111）STO衬底具有良好的晶格一致性，并且在（001）、（110）和（111）CRO薄膜中表现出最高的电导率，为1.5 × 10（5）S.m（-1）。
CaRuO3 (CRO) thin films were prepared on SrTiO3 (STO) single-crystal substrates by laser ablation, and their microstructures and the effect of lattice misfit on electrical conductivity were investigated. Pseudo-cubic (001), (110) and (111) oriented CRO thin films were grown epitaxially with the in-plane relationships on (001), (110) and (111) STO substrates at an oxygen pressure of 13 Pa and a substrate temperature of 973 K, respectively. Epitaxial (001) thin films showed a flat and smooth surface with a terrace and step structure whereas (110) CRO thin film had a faceted pyramid-like structure. The (111) CRO thin film had a rough terrace and step structure with trigonal texture. The lattice expansion of CRO would cause the decrease of the electrical conductivity. Epitaxial (111) CRO thin films has good lattice consistency with (111) STO substrate, and exhibited the highest electrical conductivity of 1.5 x 10(5) S.m(-1) among the (001), (110) and (111) CRO thin films.