Ongoing Developments of the Cryo-SEM/STEM Technique

Ongoing Developments of the Cryo-SEM/STEM Technique
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Cryo-SEM/STEM 技术的持续发展

DOI:
10.1017/s1431927615001038
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发表时间:
2015
影响因子:
2.8
通讯作者:
A. Robins
A. Robins
中科院分区:
工程技术4区
文献类型:
--
作者:
A. Robins

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扫描电子显微镜(SEM)具有多种不同的成像或分析探测器,被证明是研究大块样品结构的一种非常通用的工具。随着扫描电子显微镜(STEM)探测器的增加,该仪器还可以用于对薄片、应用于TEM型EM栅格的水悬浮液或电子透明样品进行成像。整个仪器还可以进一步配备,用于对冷冻水合的大宗样品进行成像,增加一个柱上或远程低温制备室、一个低温传输系统和一个氮气冷却的扫描电子显微镜平台。随着扫描电子显微镜分辨率的提高,低温或低温扫描电子显微镜技术已被广泛使用和采用[1]。随着场发射枪技术的引入,精细聚焦的探头即使在低加速电压下也能产生亚纳米级的分辨率。
The scanning electron microscope (SEM), with its wide variety of different detectors for imaging or analysis, proves to be an extremely versatile tool for studying the structure of bulk specimens. With the addition of a Scanning Transmission Electron Microscope (STEM) detector, the instrument can also be used for imaging thin sections, aqueous suspensions applied to a TEM-style EM grid, or electron transparent specimens. The entire instrument can be further equipped, for imaging frozen-hydrated bulk samples, with the addition of an on-column or remote cryogenic preparation chamber, a cryo-transfer system, and a nitrogen cooled SEM stage. Low temperature or cryo-SEM techniques have been widely used and adapted as the resolution of the scanning electron microscope has improved [1]. With the introduction of field emission gun technology, a finely focused probe produces sub-nanometer resolution even at low accelerating voltages.