High performance MEMS tactile sensor array with robustness and fabrication simplicity
High performance MEMS tactile sensor array with robustness and fabrication simplicity
复制标题
高性能 MEMS 触觉传感器阵列，坚固耐用且制造简单
DOI：
10.1109/memsys.2016.7421770
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
D. Young
中科院分区：
文献类型：
--
作者：
Q. Guo;C. Mastrangelo;D. Young
本文提出了一种MEMS触觉传感器阵列，采用PDMS倒金字塔传感膜粘附在基板封装传感器电极阵列。在垂直压力下，PDMS膜朝向基板偏转，从而增强了每对传感器电极之间通过PDMS介电层的电容耦合;因此增加了器件电容。由于电极阵列的设计，每个传感器的标称电容和灵敏度是高度容忍制造错位，从而大大简化了制造过程。
This paper presents a MEMS tactile sensor array that employs a PDMS inverted pyramid sensing membrane adhered over a substrate encapsulating an array of sensor electrodes. Under a vertical pressure, the PDMS membrane deflects towards the substrate, thus enhancing the capacitive coupling between each pair of sensor electrodes through the PDMS dielectric layer; hence an increased device capacitance. Due to the electrode array design, each sensor's nominal capacitance and sensitivity are highly tolerant to fabrication misalignment, thus greatly simplifying fabrication process.