Gas permeability and adsorbability of the glass-bonded porous silicon carbide ceramics with controlled pore size
Gas permeability and adsorbability of the glass-bonded porous silicon carbide ceramics with controlled pore size
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DOI：
10.1016/j.ceramint.2014.10.032
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发表时间：
2015-03
影响因子：
5.2
通讯作者：
Bo Wang;Z. Hui;Hoang-Tuan Phuong;F. Jin;Jianfeng Yang;K. Ishizaki
中科院分区：
文献类型：
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作者：
Bo Wang;Z. Hui;Hoang-Tuan Phuong;F. Jin;Jianfeng Yang;K. Ishizaki
采用常规方法制备了玻璃键合多孔碳化硅陶瓷。通过改变碳化硅起始粉的玻璃含量和粒径，可以定制孔隙率和孔径。研究了多孔碳化硅真空吸盘的微观结构对吸盘气体渗透性和吸盘与吸盘吸附力的影响。渗透率随孔隙度和平均孔径的增大而增大。多孔碳化硅陶瓷的孔隙率为32.1 ~ 64.7%，具有较高的渗透率（1.45-6.53×10−12m2）。与孔隙度相比，孔隙大小对渗透率和吸附力的影响更为显著。孔隙度相同但平均孔径较小的样品，其渗透率较低，吸附力较大。多孔碳化硅陶瓷的吸附力取决于微观结构和渗透率。当压降（ΔP）为0.055 MPa，渗透率为1.94×10−12m2时，P1000V70样品的吸附力最高，为196 N/cm2。
Glass-bonded porous silicon carbide ceramics were fabricated by conventional method. The porosity and pore size could be tailored by changing the glass content and particle size of silicon carbide starting powder. The influence of microstructure on the gas permeability and the adsorption force between chucking work-pieces and porous SiC ceramic vacuum chuck was investigated. The permeability increased with the increase of porosity and average pore diameter. High permeability (1.45–6.53×10−12m2) of the porous SiC ceramics with a porosity of 32.1–64.7% could be achieved. Compared with porosity, pore size had a dominant effect on the permeability and adsorption force. The samples with the same porosity but smaller average pore size exhibited lower permeability and much higher adsorption force. The adsorption force of porous SiC ceramics was dependent on both microstructure and permeability. The P1000V70 sample with a pressure drop (ΔP) of 0.055 MPa and permeability of 1.94×10−12m2exhibited the highest adsorption force of 196 N/cm2.