Molecular beam sampling system with very high beam-to-background ratio: the rotating skimmer concept.
Molecular beam sampling system with very high beam-to-background ratio: the rotating skimmer concept.
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具有极高光束背景比的分子束采样系统：旋转撇渣器概念。
DOI：
10.1063/1.3133804
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
A. von Keudell
中科院分区：
文献类型：
--
作者：
J. Benedikt;D. Ellerweg;A. von Keudell
提出了一种降低高压区分子束取样真空系统背景气压的新方法。三差动泵送级构造有在第一泵送级内具有旋转撇渣器的斩波器，其有效地用作将真空系统与周围环境周期性地分离的阀。在分子束中的物质的质谱测量显示出14的优异的束-背景比和低于1 ppm的检测限。这种方法的潜在的低密度活性物种在大气压等离子体中的检测被证明为在大气压微等离子体源中产生的氧原子的检测。
A novel method of reducing the background pressure in a vacuum system used for sampling a molecular beam from a high pressure region is presented. A triple differential pumping stage is constructed with a chopper with rotating skimmer within the first pumping stage, which serves effectively as a valve separating periodically the vacuum system from the ambient environment. The mass spectrometry measurement of the species in the molecular beam show an excellent beam-to-background ratio of 14 and a detection limit below 1 ppm. The potential of this method for detection of low density reactive species in atmospheric pressure plasmas is demonstrated for the detection of oxygen atoms generated in an atmospheric pressure microplasma source.