New Algorithm to Enable Construction and Display of 3D Structures from Scanning Probe Microscopy Images Acquired Layer-by-Layer
New Algorithm to Enable Construction and Display of 3D Structures from Scanning Probe Microscopy Images Acquired Layer-by-Layer
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DOI：
10.1021/acs.jpca.8b03417
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发表时间：
2018-07-05
影响因子：
2.9
通讯作者：
Liu, Gang-yu
中科院分区：
文献类型：
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作者：
Deng, William Nanqiao;Wang, Shuo;Liu, Gang-yu
扫描探针显微镜 (SPM)，例如原子力显微镜 (AFM)，因表面结构的高分辨率成像和二维 (2D) 纳米光刻而广为人知，为表面科学和材料科学提供了重要的物理见解。这项工作报告了一种新算法，可以从 SPM 图像构建和显示逐层 3D 结构。该算法能够对齐在逐层沉积过程中获取的 SPM 图像并去除冗余特征，并忠实地构建沉积的 3D 结构。显示采用“透视”策略，使每一层的结构都可见。结果证明了高空间精度以及算法的多功能性；用户可以根据图像质量和研究需要设置重建和显示的参数。据我们所知，该方法是第一份将 SPM 技术用于 3D 成像构建和显示的报告。提供详细的算法是为了方便在任何 SPM 软件中使用相同的方法。这些新功能支持需要 3D 图像重建和显示的 SPM 的广泛应用，例如 3D 非打印以及 3D 增材和减材制造和成像。
Scanning probe microscopy (SPM), such as atomic force microscopy (AFM), is widely known for high-resolution imaging of surface structures and nanolithography in two dimensions (2D), providing important physical insights into surface science and material science. This work reports a new algorithm to enable construction and display of layer-by-layer 3D structures from SPM images. The algorithm enables alignment of SPM images acquired during layer-by-layer deposition and removal of redundant features and faithfully constructs the deposited 3D structures. The display uses a "see-through" strategy to enable the structure of each layer to be visible. The results demonstrate high spatial accuracy as well as algorithm versatility; users can set parameters for reconstruction and display as per image quality and research needs. To the best of our knowledge, this method represents the first report to enable SPM technology for 3D imaging construction and display. The detailed algorithm is provided to facilitate usage of the same approach in any SPM software. These new capabilities support wide applications of SPM that require 3D image reconstruction and display, such as 3D nonoprinting and 3D additive and subtractive manufacturing and imaging.