Design and Fabrication of a Convective 3-DOF Angular Rate Sensor
Design and Fabrication of a Convective 3-DOF Angular Rate Sensor
复制标题
对流三自由度角速率传感器的设计与制造
DOI：
10.1109/icsens.2007.4388551
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发表时间：
2007
期刊：
影响因子：
--
通讯作者：
S. Sugiyama
中科院分区：
文献类型：
--
作者：
V. Dau;T. X. Dinh;D. Dao;O. Tomonori;S. Sugiyama
本文报道了一种新型的MEMS对流陀螺仪的设计、仿真和制作，该陀螺仪可以独立地检测三个角速率分量，具有高灵敏度和低功耗。新传感器的设计符合标准的体MEMS技术。在以前的工作中的高度三维流动方案成功地集成在一起的MEMS兼容层压结构的平面热线。传感器的成本将显著降低，而传感器的灵敏度将得到提高（高达[1]中作者报道的300%）。在测量应用中，3DOF陀螺仪消除了传感器到传感器的距离，并且在方向性或交叉灵敏度方面具有良好的特性，因为热线和流动通道方向之间的对准现在由光刻确定。该传感器还具有很高的抗冲击性，并防止疲劳损坏。
This paper reports the design, simulation and fabrication of a novel MEMS based convective gyroscope which can independently detect three components of angular rate at high sensitivity and low power consumption. The new sensor was designed to match the standard bulk MEMS technology. The highly 3D flow scheme in previous work was successfully integrated together with the in-plane hotwires by MEMS compatible laminated-structures. The cost of sensor will be significantly reduced while the sensitivity of the sensor is enhanced (up to 300% of that reported by the authors in [1]). In measurement application, the 3DOF gyro eliminates the sensor-to-sensor distance and has good characteristics in terms of directivity or cross-sensitivity because the alignment between hotwires and flow channel direction is now determined by photolithography. The sensor also has high shock resistance and prevents fatigue damage.