A simple, high performance piezoresistive accelerometer
A simple, high performance piezoresistive accelerometer
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DOI：
10.1109/sensor.1991.148811
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发表时间：
1991-06
期刊：
影响因子：
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通讯作者：
J.T. Suminto-
中科院分区：
文献类型：
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作者：
J.T. Suminto-
本文介绍了一种1000 g全量程压阻式加速度计的结构、制造和性能。该加速度计具有非常高的谐振频率，标称值为65 kHz，设计灵敏度为0.2 mV/g。该设计在（110）硅中执行。压敏电阻和惯性系统在一个蚀刻步骤中形成。压敏电阻悬挂在惯性质量块和支撑边缘之间，体积非常小，仅为7.8*10/sup-10/ cm/sup 3/，因此所需的应变能非常小。>
The author describes the structure, manufacture, and performance of a 1000 g full-scale piezoresistive accelerometer. This accelerometer has a very high resonant frequency, nominally 65 kHz, and is designed to have a sensitivity of 0.2 mV/g. The design is executed in (110) silicon. The piezoresistors and inertial system are formed in one etching step. The piezoresistors are suspended between the inertial mass and support rim, and are very small in volume, 7.8*10/sup -10/ cm/sup 3/, thus needing very small strain energy.>