Electron‐temperature control for plasmas passing through a negatively biased grid
Electron‐temperature control for plasmas passing through a negatively biased grid
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通过负偏压栅极的等离子体的电子温度控制
DOI：
10.1063/1.112240
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发表时间：
1994
影响因子：
4
通讯作者：
N. Sato
中科院分区：
文献类型：
--
作者：
K. Kato;S. Iizuka;N. Sato
对从放电区域通过粗网格的等离子体进行电子温度控制。通过增加施加到栅极的负电势，电子温度在覆盖几乎两个数量级的非常宽的范围内连续地降低到几乎等于直流氩气或氦气放电的情况下的背景气体温度的值。温度的降低伴随着电子密度的增加。这种电子温度控制方法也可以应用于射频和电子回旋共振放电产生的等离子体。
Electron‐temperature control is performed on plasmas passing through a coarse mesh grid from a discharge region. By increasing a negative potential applied to the grid, the electron temperature is continuously decreased in a very wide range covering almost two orders of magnitude down to the value nearly equal to the background gas temperature in case of direct current argon or helium gas discharge. The temperature decrease is accompanied by an increase in the electron density. This method of electron‐temperature control can also be applied to plasmas produced by radio‐frequency and electron cyclotron resonance discharges.