Full-field deformation measurements in the transmission electron microscope using digital image correlation and particle tracking
Full-field deformation measurements in the transmission electron microscope using digital image correlation and particle tracking
复制标题
使用数字图像相关和粒子跟踪在透射电子显微镜中进行全场变形测量
DOI：
10.1016/j.matchar.2021.111598
复制
发表时间：
2022
影响因子：
4.7
通讯作者：
Lambros, J.
中科院分区：
文献类型：
--
作者：
Zhang, Y.;Feng, L.;Dillon, S.;Lambros, J.
确定材料变形期间纳米尺度的位移和/或应变场有助于发展对材料响应的多尺度理解。基于透射电子显微镜（TEM）的全场定量运动测量落后于其他显微镜技术。在这里，我们开发了一种结合数字图像相关 (DIC) 和粒子跟踪 (PT) 的实验方法，用于表征 TEM 中非晶 SiO2 的原位微尺度变形。沉积在 SiO2 上的金纳米粒子可提供 DIC 所需的散斑图案（在子区域上平均时）和 PT 的目标粒子。为了演示和验证在 TEM 中使用 DIC 和 PT 的可行性，使用聚焦离子束 (FIB) 加工微米尺寸的 SiO2 束样品，并通过压痕加载到 TEM 中。然后应用 DIC 和 PT 根据在梁加载和蠕变期间拍摄的一系列 TEM 图像来测量原位位移。两种测量方法的结果彼此吻合，并且与所应用的位移测量吻合，从而证明了它们在通过 TEM 实验确定局部位移方面的有效性。讨论了样本漂移和图像强度变化引起的噪声源。
Determining displacement and/or strain fields at the nanoscale during material deformation can be instrumental in developing a multiscale understanding of material response. Full-field quantitative kinematic measurements based on transmission electron microscopy (TEM) are lagging behind other microscopy techniques. Here, we develop an experimental approach combining digital image correlation (DIC) and particle tracking (PT) for characterizingin situmicroscale deformation of amorphous SiO2in the TEM. Gold nanoparticles deposited on SiO2provide both the speckle pattern required by DIC when averaged over a subset region and target particles for PT. To demonstrate and validate the feasibility of using DIC and PT in the TEM, micron sized SiO2beam samples are machined using a focused ion beam (FIB) and loaded in the TEM via indentation. DIC and PT are then applied to measurein situdisplacements from a sequence of TEM images taken during loading and creep of the beam. Results of the two measurement methods agree well with each other and with the applied displacement measurements, thus demonstrating their effectiveness in determining local displacements from TEM experiments. Sources of noise resulting from sample drift and image intensity variations are discussed.