Mid-IR source based on a free-standing microhotplate for autonomous CO2 sensing in indoor applications
Mid-IR source based on a free-standing microhotplate for autonomous CO2 sensing in indoor applications
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DOI：
10.1016/j.sna.2011.09.027
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发表时间：
2011-12-01
影响因子：
4.6
通讯作者：
Nicoletti, Sergio
中科院分区：
文献类型：
--
作者：
Barritault, Pierre;Brun, Mickael;Nicoletti, Sergio
通过非色散吸收法（NH3）测量CO2通常被用作密闭生活空间中人类居住的示踪剂。商业传感器的主要限制来自于红外光源的功耗，这使得它们不适合于自主操作。本文报道了一种基于硅微加工的微热板的黑体红外光源的制造和表征，该光源适合于在650 ℃以上工作。采用最先进的MEMS技术，可以将功耗降低到50 mW以下，同时确保使用寿命超过10年。微热板在发生CO2吸附的光谱范围内的辐射率表明，该设备可以作为准完美的黑体源工作，提供足够的功率来驱动用于CO2检测的自主NATIONAL系统。(C)2011 Elsevier B.V.保留所有权利。
The measurement of CO2 by Non-Dispersive InfraRed absorption (NDIR) is often used as a tracer of human occupancy in confined living spaces. The major constraint of commercial sensors comes from the power consumption of the IR source, which makes them unsuitable for autonomous operation.This paper reports the fabrication and the characterization of a black-body IR source based on a micro-hotplate micromachined in Si and suitable to work above 650 degrees C. The use of state-of-the-art MEMS technologies allows to lower the power consumption below 50 mW while ensuring a lifetime well beyond 10 years.The radiance of the microhotplate in the spectral range where CO2 adsorption takes place indicated that the device works as a quasi-perfect blackbody source providing enough power to drive an autonomous NDIR system for CO2 detection. (C) 2011 Elsevier B.V. All rights reserved.