Kinetics of the adsorption of atomic oxygen (N2O) on the Si(001)2x1 surface as revealed by the change in the surface conductance
Kinetics of the adsorption of atomic oxygen (N2O) on the Si(001)2x1 surface as revealed by the change in the surface conductance
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DOI:
10.1016/0039-6028(92)90898-g
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发表时间:
1992
期刊:
影响因子:
1.9
通讯作者:
H. Wormeester;E. Keim;A. Silfhout
中科院分区:
文献类型:
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作者:
H. Wormeester;E. Keim;A. Silfhout