Investigation of EUV emission from Sn to rare-earth plasmas in terms of the accuracy of the atomic data and completeness of atomic model

Investigation of EUV emission from Sn to rare-earth plasmas in terms of the accuracy of the atomic data and completeness of atomic model
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从原子数据的准确性和原子模型的完整性方面研究从锡到稀土等离子体的 EUV 发射

DOI:
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发表时间:
2023
期刊:
proceedings of SPIE Optical and EUV nanolithography XXXVI
影响因子:
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通讯作者:
A. Sasaki
A. Sasaki
中科院分区:
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文献类型:
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作者:
Hirata Akiko;Fukasawa Masanaga;Tercero Jomar U.;Kugimiya Katsuhisa;Hagimoto Yoshiya;KARAHASHI Kazuhiro;Hamaguchi Satoshi;Iwamoto Hayato;Masaki Fujita;A. Sasaki

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