Physical properties of highly oriented spray-deposited fluorine-doped tin dioxide films as transparent conductor
Physical properties of highly oriented spray-deposited fluorine-doped tin dioxide films as transparent conductor
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DOI：
10.1016/j.solmat.2009.01.021
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发表时间：
2009-08
影响因子：
6.9
通讯作者：
C. Agashe;J. Hüpkes;G. Schöpe;M. Berginski
中科院分区：
文献类型：
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作者：
C. Agashe;J. Hüpkes;G. Schöpe;M. Berginski
使用高前体浓度通过喷雾热解沉积重度氟掺杂的二氧化锡薄膜。研究了 80-1230nm 范围内薄膜厚度的影响。这些薄膜是多晶的并且优先沿[200]取向。对于1000nm薄膜，晶粒尺寸、载流子迁移率μ、载流子浓度N和电阻率分别达到～230nm、35cm2/Vs、6×1020cm−3和3×10−4Ωcm。不寻常的“直接和线性”μ-N 依赖性揭示了结构特性的重要性。 1000nm 厚的薄膜在 2500nm 处的平均可见光透射率约为 81%，反射率约为 66%。电光特性揭示了其作为 TCO 材料的卓越品质。
Heavily fluorine-doped tin dioxide films were deposited by spray pyrolysis using a high precursor concentration. The effect of film thickness was studied in the range 80–1230nm. The films were polycrystalline and preferentially oriented along [200]. The grain size, carrier mobility μ, carrier concentration N and resistivity reached ∼230nm, 35cm2/Vs, 6×1020cm−3and 3×10−4Ωcm, respectively, for 1000nm films. An unusual ‘direct and linear’μ–N dependence revealed the importance of the structural properties. The 1000nm thick films possessed an average visible transmittance ∼81% and a reflectance ∼66% at 2500nm. The electro-optical properties revealed their excellent quality as a TCO material.