Effect of a ferroelectric inversion layer on the temperature characteristics of SH-Type surface acoustic waves on 36/spl deg/ Y-X LiTaO/sub 3/ substrates
Effect of a ferroelectric inversion layer on the temperature characteristics of SH-Type surface acoustic waves on 36/spl deg/ Y-X LiTaO/sub 3/ substrates
复制标题
铁电反型层对 36/spl deg/ Y-X LiTaO/sub 3/ 基底上 SH 型声表面波温度特性的影响
DOI：
10.1109/58.330268
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发表时间：
1994
期刊：
影响因子：
--
通讯作者：
A. Tourlog
中科院分区：
文献类型：
--
作者：
K. Nakamura;A. Tourlog
对36/spl deg/ Y-X LiTaO/sub 3/铁电反型层衬底上SH型声表面波的延迟温度系数进行了理论分析，结果表明，通过畴界的电场短路效应可以改善温度特性。延迟温度系数的实验结果与理论结果吻合较好。对于金属化表面情况，测得的延迟温度系数的最小值为 12.6 ppm//spl deg/C，大约是没有反型层的 36/spl deg/Y-X 基板中的三分之一。还给出了SH型表面声波的相速度和机电耦合因子的实验结果，并与理论值进行了比较。<<ETX>>
The temperature coefficient of delay of the SH-type surface acoustic wave on 36/spl deg/ Y-X LiTaO/sub 3/ substrates with a ferroelectric inversion layer is theoretically analyzed and it is shown that the temperature characteristics can be improved by an electric-field short-circuiting effect of the domain boundary. The experimental results of the temperature coefficient of delay agree well with the theoretical. The minimum value of measured temperature coefficients of delay is 12.6 ppm//spl deg/C for the metallized surface case, which is about one-third of that in a 36/spl deg/ Y-X substrate with no inversion layer. Experimental results on the phase velocity and the electromechanical coupling factor of the SH-type surface acoustic wave are also presented and compared with the theoretical.<<ETX>>