Comparison of 1D and 2D particle-in-cell simulations for DC magnetron sputtering discharges
Comparison of 1D and 2D particle-in-cell simulations for DC magnetron sputtering discharges
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DOI：
10.1063/5.0029353
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发表时间：
2021-01-01
影响因子：
2.2
通讯作者：
Fan, Qi Hua
中科院分区：
文献类型：
--
作者：
Zheng, Bocong;Fu, Yangyang;Fan, Qi Hua
对平衡直流磁控溅射 (DCMS) 放电进行一维和二维细胞内粒子 (PIC)/蒙特卡罗碰撞模拟。在相似的放电强度下，即相似的局部放电电流密度，在目标跑道上方的两次模拟获得的等离子体参数具有相似的特征和大小。在两个模拟中都再现了 DCMS 放电中常见的电子能量分布高能尾部。证实了利用一维模拟定性研究平衡DCMS放电特性的准确性和适用性。在捕获DCMS中的关键物理机制方面，一维PIC仿真是一种有效的方法，它可以很大程度上减少计算费用并保持建模结果的物理保真度。
One-dimensional and two-dimensional particle-in-cell (PIC)/Monte Carlo collision simulations are performed for a balanced direct current magnetron sputtering (DCMS) discharge. The plasma parameters obtained by both simulations above the target racetrack share similar features and magnitudes under similar discharge intensities, i.e., similar local discharge current densities. The commonly observed high-energy tail of electron energy distribution in DCMS discharges is reproduced in both simulations. The accuracy and applicability of using one-dimensional simulations to qualitatively investigate the characteristics of balanced DCMS discharge are confirmed. In terms of capturing the key physical mechanisms in DCMS, one-dimensional PIC simulation is an efficient method, which could largely alleviate the computational expense and preserve the physical fidelity of modeling results.