Fabrication of Barium Titanate/Strontium Titanate Artificial Superlattice by Atomic Layer Epitaxy
Fabrication of Barium Titanate/Strontium Titanate Artificial Superlattice by Atomic Layer Epitaxy
复制标题
原子层外延法制备钛酸钡/钛酸锶人工超晶格
DOI：
10.1143/jjap.33.5192
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发表时间：
1994
影响因子：
1.5
通讯作者：
Masaki Daimon Masaki Daimon
中科院分区：
文献类型：
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作者：
T. Tsurumi;Toshimasa Suzuki;Masayuki Yamane Masayuki Yamane;Masaki Daimon Masaki Daimon
采用分子束外延(MBE)原子层外延控制系统，采用交替蒸发法外延生长了BaTiO_3、SrTiO_3及其超晶格。该系统通过层层生长实现了对化学成分的稳定和可重复性控制。在钛酸锶衬底上外延生长了BaTiO_3和SrTiO_3，并观察到反射高能电子衍射(RHEED)强度的明显振荡，对应于BaTiO_3生长过程中BaO和TiO_2的交替沉积。制备了结构为[(BaTiO_3)_5/(SrTiO_3)_5]_7的人工超晶格，并用阶跃模型模拟了超晶格的X射线衍射谱。X射线衍射谱中卫星峰的衍射角和Laue峰的形状与计算值一致，表明所设计的结构是在超晶格中形成的。
Epitaxial growth of BaTiO3, SrTiO3 and their superlattices was carried out by the alternating evaporation method using an atomic-layer-epitaxy control system for molecular beam epitaxy (MBE). Stable and reproducible control of the chemical composition was achieved by layer-by-layer growth with this system. Both BaTiO3 and SrTiO3 were grown epitaxially on SrTiO3 substrates, and clear oscillations of reflection high-energy electron diffraction (RHEED) intensity were observed, corresponding to the alternating depositions of BaO and TiO2 in BaTiO3 growth. The artificial superlattice with the structure of [(BaTiO3)5/(SrTiO3)5]7 was fabricated, and the X-ray diffraction (XRD) pattern of the superlattice was simulated by a step model. Diffraction angles of satellite peaks and the shape of Laue peaks in XRD patterns were consistent with those calculated, indicating that the designed structure was fabricated in the superlattice.