Low thermal drift in highly sensitive doped channel Al0.3Ga0.7As/GaAs/In0.2Ga0.8As micro-Hall element

Low thermal drift in highly sensitive doped channel Al0.3Ga0.7As/GaAs/In0.2Ga0.8As micro-Hall element
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DOI:
10.1007/s10854-007-9408-0
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发表时间:
2008-09-01
影响因子:
2.8
通讯作者:
Wiebicke, Evi
Wiebicke, Evi
中科院分区:
工程技术4区
文献类型:
--
作者:
Kunets, Vasyl P.;Dobbert, Julia;Wiebicke, Evi

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采用赝晶Al(0.3)Ga(0.7)As/GaAs/In(y)Ga(1-y)As(0.2)材料制作了5 μ m见方的高灵敏度、低噪声、高热稳定性的微霍尔传感器
Micro-Hall sensors with high sensitivity, low noise, and high thermal stability, 5 mu m square, are fabricated using pseudomorphic Al(0.3)Ga(0.7)As/GaAs/In (y) Ga(1-y) As (0.2