Ultrafast multi-layer subtractive patterning.
Ultrafast multi-layer subtractive patterning.
复制标题
超快多层减法图案化。
DOI：
10.1364/oe.26.011928
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发表时间：
2018
期刊：
影响因子：
3.8
通讯作者：
B. Mills
中科院分区：
文献类型：
--
作者：
Daniel J. Heath;T. H. Rana;Rupert. A. Bapty;J. Grant;Yunhui Xie;R. Eason;B. Mills
采用减法飞秒激光加工方法，利用位于样品上同一位置、具有不同空间光强分布的多个脉冲来制作表面浮雕结构。数字微镜装置被用作强度空间光调制器，相对于样品具有固定的位置，以确保连续掩模之间的最佳对准。产生了多达50个不同的层，335 nm的横向空间分辨率和2.6微米的最大深度结构。这些结构的横向尺寸约为40微米。表面浮雕结构与镍衬底中的预期深度轮廓相匹配，还展示了在近距离缝合相同特征的高度可重复缝合。
Subtractive femtosecond laser machining using multiple pulses with different spatial intensity profiles centred on the same position on a sample has been used to fabricate surface relief structuring. A digital micromirror device was used as an intensity spatial light modulator, with a fixed position relative to the sample, to ensure optimal alignment between successive masks. Up to 50 distinct layers, 335 nm lateral spatial resolution and 2.6 µm maximum depth structures were produced. The lateral dimensions of the structures are approximately 40 µm. Surface relief structuring is shown to match intended depth profiles in a nickel substrate, and highly repeatable stitching of identical features in close proximity is also demonstrated.