Soft X-ray microscopy at a spatial resolution better than 15nm
Soft X-ray microscopy at a spatial resolution better than 15nm
复制标题
DOI：
10.1038/nature03719
复制
发表时间：
2005-06-30
期刊：
影响因子：
64.8
通讯作者：
Attwood, DT
中科院分区：
文献类型：
--
作者：
Chao, WL;Harteneck, BD;Attwood, DT
具有纳米级空间分辨率的分析工具对于生命和物理科学是不可或缺的。希望这些工具还能够以大穿透深度进行 10 nm 或更小尺度的元素和化学识别。目前正在开发多种 X 射线成像技术 (1-7)，以提供这些组合功能。在这里，我们报告了使用波带片制造的叠加技术，利用软 X 射线显微镜实现了亚 15 纳米的空间分辨率，并提供了低于 10 纳米的清晰路径。该显微镜覆盖的光谱范围从光子能量250 eV（类似于5 nm波长）到1.8 keV（类似于0.7 nm），因此可以探测C、N、O、Al、Ti、Fe、Co和Ni等元素的初级K和L原子共振。因此，这种 X 射线显微镜技术适用于广泛的研究：水窗中的生物成像 (8,9)；潮湿环境样品的研究(10,11)；具有元素和自旋轨道敏感性的磁性纳米结构的研究(12-14)；需要透过薄窗口、涂层或基板进行观察的研究（例如硅芯片中埋藏的电子设备(15)）；以及低温固定生物细胞的三维成像(9,16)。
Analytical tools that have spatial resolution at the nanometre scale are indispensable for the life and physical sciences. It is desirable that these tools also permit elemental and chemical identification on a scale of 10 nm or less, with large penetration depths. A variety of techniques(1-7) in X-ray imaging are currently being developed that may provide these combined capabilities. Here we report the achievement of sub-15-nm spatial resolution with a soft X-ray microscope - and a clear path to below 10 nm - using an overlay technique for zone plate fabrication. The microscope covers a spectral range from a photon energy of 250 eV (similar to 5 nm wavelength) to 1.8 keV (similar to 0.7 nm), so that primary K and L atomic resonances of elements such as C, N, O, Al, Ti, Fe, Co and Ni can be probed. This X-ray microscopy technique is therefore suitable for a wide range of studies: biological imaging in the water window(8,9); studies of wet environmental samples(10,11); studies of magnetic nanostructures with both elemental and spin-orbit sensitivity(12-14); studies that require viewing through thin windows, coatings or substrates ( such as buried electronic devices in a silicon chip(15)); and three-dimensional imaging of cryogenically fixed biological cells(9,16).