Effect of superimposed ultrasound on mechanical properties of copper
Effect of superimposed ultrasound on mechanical properties of copper
复制标题
叠加超声对铜力学性能的影响
DOI：
10.1179/026708310x12683157551450
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发表时间：
2011
期刊：
影响因子：
--
通讯作者：
Dong Du
中科院分区：
文献类型：
--
作者：
H. Huang;B. Chang;Dong Du
铜线在微电子封装制造中的应用越来越广泛。采用实验和有限元方法研究了直径为100 μm的Cu无空气球的变形过程。实验结果表明，叠加超声波可以使铜FAB软化。建立了非线性有限元模型，研究了铜FAB的变形过程。数值实验已经进行了量化的叠加超声上的本构模型的Cu FAB的影响。在此基础上，建立了考虑动态声软化效应的改进幂律材料模型。在不同的超声强度下，数值预测和实验获得的Cu FAB的变形实现了良好的一致性。
Cu wire is increasingly used in microelectronics packaging manufacturing. In the present paper, the deforming procedure of 100 μm diameter Cu free air balls (FABs) is studied using experimental and finite element (FE) methods. Experimental results show that the superimposed ultrasound can make the Cu FAB softer. Then a non-linear FE model is built to study the deforming process of the Cu FAB. Numerical experiments have been carried out to quantify the effects of superimposed ultrasound on the constitutional model of Cu FABs. An improved power law material model is then established to take into the dynamic acoustic softening effects. A good consistency is achieved in numerically predicted and experimentally obtained deformations of the Cu FAB under various ultrasonic intensities.