Freestanding Membranes of Cross-Linked Gold Nanoparticles: Novel Functional Materials for Electrostatic Actuators
Freestanding Membranes of Cross-Linked Gold Nanoparticles: Novel Functional Materials for Electrostatic Actuators
复制标题
DOI：
10.1021/acsami.5b02691
复制
发表时间：
2015-07-22
影响因子：
9.5
通讯作者：
Vossmeyer, Tobias
中科院分区：
文献类型：
--
作者：
Schlicke, Hendrik;Battista, Daniela;Vossmeyer, Tobias
有机交联金纳米颗粒(GNPs)具有可调的电学、光学和机械性能，使其成为在微纳机电系统中应用的有趣材料。在这里，我们展示了α，欧米伽-烷基二硫醇交联的GNP膜作为静电驱动致动器的应用。这些器件是通过将这些膜(厚度29-45 nm)沉积到圆柱形空腔(直径类似于200微米，深度类似于8-15微米)上制造的，这些空腔是在SU-8抗蚀剂上进行光刻图案的。根据原子力显微镜、共聚焦显微镜和干涉测量法的测量，在薄膜和硅衬底上施加高达+/-40V的电压使薄膜偏转数百纳米。用一个简单的静电模型来解释实验数据，该模型考虑了膜的力学性质。
Their tunable electrical, optical, and mechanical properties make freestanding membranes of organically cross-linked gold nanoparticles(GNPs) interesting materials for applications in micro- and nanoelectromechanical systems. Here, we demonstrate the application of alpha,omega-alkanedithiol-cross-linked GNP membranes as electrostatically driven actuators. The devices were fabricated by depositing these membranes (thickness 29-45 nm) onto cylindrical cavities (diameter similar to 200 mu m; depth similar to 8-15 mu m), which were lithographically patterned in a SU-8 resist. Applying voltages of up to +/- 40 V across the membrane and the silicon substrate deflected the membranes by several hundreds of nanometers, as measured by atomic force microscopy, confocal microscopy, and interferometry. A simple electrostatic model, which takes into account the membranes' mechanical properties, was used to interpret the experimental data.