Three-Dimensional Microstructure Reconstruction Using FIB-OIM
Three-Dimensional Microstructure Reconstruction Using FIB-OIM
复制标题
使用 FIB-OIM 进行三维微观结构重建
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
G. Rohrer
中科院分区：
文献类型：
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作者：
Sukbin Lee;A. Rollett;G. Rohrer
介绍了一种利用聚焦离子束定向成像显微术（FIB OIM）重建三维微结构的新方法。该技术对于材料的三维微结构的研究是重要的，因为它可以在亚微米尺度上自动对齐（配准）一系列具有拓扑信息和取向信息的平行截面。使用基于体素的镶嵌，通过配准每个部分来重建三维微观结构。描述了该方法在立方材料中的应用，并基于重建，表征了晶粒形状和晶粒尺寸分布。
A new method for reconstructing a three-dimensional microstructure using the focused ion beam-orientation imaging microscopy (FIB-OIM) is introduced. The technique is important for the study of three-dimensional microstructures of materials because it can automatically align (register) a series of parallel sections with both topological information and orientation information at the sub-micrometer scale. Using voxel-based tessellation, a three-dimensional microstructure is reconstructed by registering each section. The application of the method to a cubic material is described and, based on the reconstruction, the grain shape and grain size distribution are characterized.