Quantitative evaluation and removal of periodic error caused by ghost reflections in a double-path homodyne interferometer
Quantitative evaluation and removal of periodic error caused by ghost reflections in a double-path homodyne interferometer
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DOI：
10.1088/1361-6501/ac929e
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发表时间：
2022-09
影响因子：
2.4
通讯作者：
Y. Hori
中科院分区：
文献类型：
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作者：
Y. Hori
本文讨论了双路零差干涉仪中由鬼影反射引起的周期误差，由于其独特的频率，很难用所谓的海德曼方法消除。周期性误差的机理由一个以测量光路往返次数为中心建立的理论方程来表示。根据这一理论，发现特定的周期误差是由测量光反射在光学元件的一个表面上引起的。为了评估周期性误差的存在和消除，采用了自评估方法，并将其扩展到包括鬼影反射。实验证据表明，在该表面上设置的楔形物防止了不需要的反射，并将周期误差减小到大约2 PM
This paper discusses periodic error caused by ghost reflections in a double-path homodyne interferometer, which is difficult to be removed by so-called Heydemann’s method due to its unique frequency. The mechanism of the periodic error is represented by a theoretical equation established focusing on the number of round trips of a measurement light path. Based on the theory, it was found that specific periodic errors are caused by the measurement light reflected on one surface of an optical element. To evaluate the presence and removal of the periodic error, the self-evaluation method, which was extended to include ghost reflections, was applied. Experimental evidence shows that a wedge provided on that surface prevents unwanted reflections and reduces the periodic error to approximately 2 pm.