Signal formation in depth-scanning 3D interference microscopy at high numerical apertures
Signal formation in depth-scanning 3D interference microscopy at high numerical apertures
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高数值孔径深度扫描 3D 干涉显微镜中的信号形成
DOI：
10.1117/12.2197635
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发表时间：
2015
期刊：
影响因子：
--
通讯作者：
W. Xie
中科院分区：
文献类型：
--
作者：
P. Lehmann;W. Xie
随着精密制造和微技术能力的提高，对高精度工业计量系统的需求也在不断增加。关于光学计量，特别是光学轮廓仪的横向分辨率能力变得重要。此外，如果需要纳米高度分辨率，干涉仪似乎是最有前途的仪器。这方面的贡献集中在干涉显微镜使用高数值孔径的物镜，以达到高的横向分辨率。增加数值孔径影响通过所谓的深度扫描获得的干涉信号的包络以及相位，即。e.改变测量物体和干涉显微镜之间的距离。高数值孔径物镜的焦深限制了信号包络的宽度，同时增加了条纹间距，这导致更长的有效波长。我们证明了这些效果的实际后果，使用自组装Linnik干涉仪的0.9数值孔径。从具体的测量对象所产生的现象将被讨论：台阶高度结构可能会导致进一步的变化的有效波长的信号光谱的变化，由于在一个单一的艾里盘内的干涉现象的结果。这可能会影响干涉显微镜在特定测量任务中的横向分辨率。此外，如果测量台阶高度结构，则测量结果对TE或TM偏振的强烈依赖性发生。对偏振依赖性进行建模需要考虑菲涅耳反射系数和边缘衍射现象的角度依赖性。虽然可以通过增加数值孔径来增加倾斜表面的最大可测量表面斜率，但是与显微镜的光学分辨率相比，由于条纹密度的限制，这将通过从啁啾形状的表面标准获得的测量结果来证明。
Increasing capabilities in precision manufacturing and micro technology are accompanied by increasing demands for high precision industrial metrology systems. With respect to optical metrology especially the lateral resolution capabilities of an optical profiler gains in importance. If, in addition, nanometer height resolution is needed interferometers seem to be the most promising instruments. This contribution focuses on interference microscopes using objective lenses of high numerical apertures in order to reach high lateral resolution. Increasing the numerical aperture influences both, the envelope as well as the phase of interference signals obtained by a so-called depth scan, i. e. changing the distance between the measuring object and the interference microscope. The depth of focus of a high numerical aperture objective limits the width of the signal envelope simultaneously increasing the fringe spacing which results in a longer effective wavelength. We demonstrate the practical consequences of these effects using a self-assembled Linnik interferometer of 0.9 numerical aperture. Phenomena resulting from concrete measuring objects will be discussed: Step height structures may lead to a further change of the effective wavelength as a consequence of changes in the signal spectrum due to interference phenomena within a single Airy disk. This may influence the lateral resolution of an interference microscope for a specific measurement task. In addition, a strong dependence of the measurement results on either TE or TM polarization occurs if step height structures are measured. Modeling the polarization dependence requires to consider the angle dependence of Fresnel reflection coefficients and edge diffraction phenomena. Although the maximum measurable surface slope of a tilted surface can be increased by increasing the numerical aperture there is a limitation due to the fringe density compared to the optical resolution of the microscope as it will be demonstrated by measurement results obtained from a chirp-shaped surface standard.
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采用 MMX 技术的现代光学三维轮廓测量系统中数据缩减的快速算法。
影响因子：
1.9
作者：
M. Fleischer;R. Windecker;H. Tiziani
通讯作者：
H. Tiziani
垂直扫描白光干涉仪的横向分辨率和传输特性。
影响因子：
1.9
作者：
Weichang Xie;P. Lehmann;J. Niehues
通讯作者：
J. Niehues
影响因子：
5.5
作者：
P. Lehmann;J. Niehues;S. Tereschenko
通讯作者：
P. Lehmann;J. Niehues;S. Tereschenko
DOI：
--
发表时间：
2013
期刊：
Other Conferences
影响因子：
--
作者：
P. Lehmann;Weichang Xie;P. Kuehnhold;J. Niehues
通讯作者：
J. Niehues
Chirp-Kalibriernormale für Oberflächenmessgeräte（表面测量仪器的 Chirp 校准标准）
DOI：
10.1524/teme.2007.74.11.572
发表时间：
2007
期刊：
--
影响因子：
--
作者：
R. Krüger;Peter Bakucz;L. Jung;H. Wilhelms
通讯作者：
H. Wilhelms