Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators
Microscale Glass-Blown Three-Dimensional Spherical Shell Resonators
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DOI：
10.1109/jmems.2011.2127453
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发表时间：
2011-06-01
影响因子：
2.7
通讯作者：
Shkel, Andrei M.
中科院分区：
文献类型：
--
作者：
Prikhodko, Igor P.;Zotov, Sergei A.;Shkel, Andrei M.
介绍了一种设计和批量制造三维各向同性球壳谐振器的新方法。该方法利用压力和表面张力在晶圆尺度上驱动塑性变形（玻璃吹制），作为创造固有光滑和对称的3-D谐振结构的机制。通过制造和表征直径为毫米级、平均厚度为10 μ m的Pyrex玻璃球壳谐振器，证明了新方法的可行性，并使用与壳一起共制的金属电极来驱动两种动态平衡的四节点和六节点振动模式。对于1 mhz玻璃吹制谐振器，在没有任何修整或调谐的情况下，测量到两个简并四节点酒杯模式之间的相对频率失配δ f/f为0.63%。对于高阶六节点酒杯模式，相对频率失配仅为0.2%，显示了精密制造的潜力。该技术所实现的内在制造对称性可能会激发用于通信和惯性导航的新型高性能3-D MEMS。(2010 - 0268)
This paper introduces a new paradigm for design and batch fabrication of isotropic 3-D spherical shell resonators. The approach uses pressure and surface tension driven plastic deformation (glassblowing) on a wafer scale as a mechanism for creating inherently smooth and symmetric 3-D resonant structures. The feasibility of the new approach was demonstrated by fabrication and characterization of Pyrex glass spherical shell resonators with millimeter-scale diameter and average thickness of 10 mu m. Metal electrodes cofabricated along with the shell were used to actuate the two dynamically balanced four- and six-node vibratory modes. For 1-MHz glass-blown resonators, the relative frequency mismatch Delta f/f between the two degenerate four-node wineglass modes was measured as 0.63% without any trimming or tuning. For the higher order six-node wineglass modes, the relative frequency mismatch was only 0.2%, demonstrating the potential for precision manufacturing. The intrinsic manufacturing symmetry enabled by the technology may inspire new classes of high-performance 3-D MEMS for communication and inertial navigation. [2010-0268]