Computer simulation of temperature field of multilayer pyroelectric thin film IR detector
Computer simulation of temperature field of multilayer pyroelectric thin film IR detector
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DOI：
10.1016/j.ceramint.2003.12.057
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发表时间：
2004-01-01
影响因子：
5.2
通讯作者：
Li, B
中科院分区：
文献类型：
--
作者：
Li, L;Zhang, LY;Li, B
多层热释电薄膜红外探测器利用热释电效应将温度变化转化为相应的电信号。热释电薄膜的大温度变化率对热释电薄膜红外探测器的高响应性具有重要意义。利用有限元分析软件Ansys对多层热释电薄膜红外探测器的温度场进行了数值模拟。结果表明，多孔二氧化硅薄膜作为绝热层，明显减少了热释电薄膜向硅衬底的热传导所造成的热损失。有6微米多孔二氧化硅薄膜的热释电薄膜的温度变化率比没有多孔二氧化硅薄膜的温度变化率高一个数量级。文中还讨论了影响热电薄膜温度变化率的其他因素。(C)2004年爱思唯尔有限公司和Techna Group S.r.l.版权所有。
Multilayer pyroelectric thin film IR detector uses the pyroelectric effect to transform temperature variation to corresponding electrical signal. Large temperature variation rate in pyroelectric film is very important for high response of the pyroelectric thin film IR detector. In this paper, a finite element modeling (FEM) using ANSYS applied to simulate the temperature field of multilayer pyroelectric thin film IR detector. The results show that the porous silica film as a thermal-insulation layer obviously reduced the heat loss due to the conduction of heat from the pyroelectric film to the Si substrate. Temperature variation rate in pyroelectric film with 6 mum porous SiO2 film is one order of magnitude higher than those without porous silica film. Other factors that influence temperature variation rate in pyroetectric film are also discussed. (C) 2004 Elsevier Ltd and Techna Group S.r.l. All rights reserved.