Micro-triboelectric generator for zero-power shock detection
Micro-triboelectric generator for zero-power shock detection
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DOI：
10.1016/j.nanoen.2022.107758
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发表时间：
2022-09
期刊：
影响因子：
17.6
通讯作者：
Mohammad Alzgool;M. Mousavi;B. Davaji;Shahrzad Towfighian
中科院分区：
文献类型：
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作者：
Mohammad Alzgool;M. Mousavi;B. Davaji;Shahrzad Towfighian
这项工作展示了微型摩擦发电机和MEMS静电致动器系统的组合的零功率冲击传感，其中对发电机的机械冲击使其产生电压，该电压被用来致动微电子机械系统(MEMS)开关。首次提出了一种基于MEMS技术的摩擦电纳米发电机的制作工艺。MEMS-Teng有一个悬浮的1.5 mm×1.5 mm的板，与基板之间的距离为2μm。该发电机是一种摩擦换能器，由悬挂在聚酰亚胺(PI)薄层上的铝微板制成，后面覆盖着另一层铝层。如果冲击波足够强，微型板就会撞到它的衬底。碰撞的结果是带电，PI带负电荷，而Al带正电荷。将发电机连接到MEMS开关，我们使用产生的电压来驱动MEMS开关。在2.3g下，Teng能够提供高达0.4V的电压差。我们使用MEMS-Teng驱动一个悬臂式微机械开关(500×20×2μm)，该开关与固定的底部电极之间的间隙为2μm。摩擦发电机以高电压和低电流而闻名，这使其成为与需要超低功率运行的MEMS静电设备集成的理想选择。我们的可行性研究打开了数十亿创新设备的大门，这些创新设备可以从这种协同组合中创造出来。
This work shows zero-power shock sensing for the combination of a micro-triboelectric generator and MEMS electrostatic actuator system where the mechanical shock to the generator causes it to produce voltage, this voltage is used to actuate a Micro-Electro-Mechanical-system (MEMS) switch. For the first time, we present the fabrication process of a Triboelectric-Nano-Generator (TENG) with MEMS technology. The MEMS-TENG has a suspended 1.5 mm× 1.5 mm plate separated by 2 μ m from the substrate. The generator is a triboelectric transducer made of a suspended Al micro-plate above a polyimide (PI) thin layer that is covered by another Al layer in the back. In case the shock is sufficiently strong, the micro-plate hits its substrate. As a result of the impact, electrification happens and PI gets negatively charged, while the Al gets positively charged. Connecting the generator to a MEMS switch, we use the generated voltage to actuate a MEMS switch. The TENG was able to supply voltage difference up to 0.4 V at 2.3 g. We use the MEMS-TENG to actuate a cantilevered MEMS switch (500× 20× 2 μ m) separated by a 2 μ m gap from a fixed bottom electrode. Triboelectric generators are known for high voltages and low currents, which makes them ideal for integration with MEMS electrostatic devices that require ultra-low power to operate. Our feasibility study opens doors to billions of innovative devices that can be created from this synergistic combination.