Elemental composition x-ray fluorescence analysis with a TES-based high-resolution x-ray spectrometer
Elemental composition x-ray fluorescence analysis with a TES-based high-resolution x-ray spectrometer
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DOI：
10.1088/1674-1056/acd926
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发表时间：
2023-09-01
影响因子：
1.7
通讯作者：
Liu，Zhi
中科院分区：
文献类型：
--
作者：
Wu，Bingjun;Xia，Jingkai;Liu，Zhi
元素组成的准确分析在功能材料的研究中起着至关重要的作用。发射特征X射线荧光(XRF)光子可用于精确区分特定元素。传统的使用半导体探测器的XRF方法的探测精度受到能量分辨率的限制，因此对精确标度每个XRF光子的实际能量提出了挑战。我们采用了一种基于超导跃迁边缘传感器(TES)的新型高分辨率X射线光谱仪，用于不同元素的XRF光谱测量。这种新型光谱仪具有高能量分辨率、高探测效率和精确的线性度等特点，将为X射线荧光分析元素组成带来显著的好处。本文研究了三种相邻稀土元素的均匀混合样品的L边发射线分布。与商用硅漂移探测器相比，能量分辨率提高了两个数量级。利用这种基于TES的光谱仪，可以清楚地分辨出背景重叠或干扰的谱线，从而使化学成分分析更加准确和定量。然后，可以构建频谱的线强度的系数值的数据库。采用新型XRF光谱仪和已建立的系数数据库，可实现对未知样品中某元素组成比例的直接分析，准确度高。
The accurate analysis of the elemental composition plays a crucial role in the research of functional materials. The emitting characteristic x-ray fluorescence (XRF) photons can be used for precisely discriminating the specified element. The detection accuracy of conventional XRF methodology using semiconductor detector is limited by the energy resolution, thus posing a challenge in accurately scaling the actual energy of each XRF photon. We adopt a novel high-resolution x-ray spectrometer based on the superconducting transition-edge sensor (TES) for the XRF spectroscopy measurement of different elements. Properties including high energy resolution, high detection efficiency and precise linearity of the new spectrometer will bring significant benefits in analyzing elemental composition via XRF. In this paper, we study the L-edge emission line profiles of three adjacent rare earth elements with the evenly mixed sample of their oxide components: terbium, dysprosium and holmium. Two orders of magnitude better energy resolution are obtained compared to a commercial silicon drift detector. With this TES-based spectrometer, the spectral lines overlapped or interfered by background can be clearly distinguished, thus making the chemical component analysis more accurate and quantitative. A database of coefficient values for the line strength of the spectrum can then be constructed thereafter. Equipped with the novel XRF spectrometer and an established coefficient database, a direct analysis of the composition proportion of a certain element in an unknown sample can be achieved with high accuracy.