The role of oxygen in oblique-deposited CoNi thin films
The role of oxygen in oblique-deposited CoNi thin films
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氧在倾斜沉积CoNi薄膜中的作用
DOI：
10.1109/tmag.1986.1064354
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发表时间：
1986
影响因子：
2.1
通讯作者：
D. Majumdar
中科院分区：
文献类型：
--
作者：
J. Gau;R. Spahn;D. Majumdar
介绍了斜沉积过程中氧的引入对沉积膜的磁性能和柱状结构的影响。面内矫顽力随氧流速的双峰变化被认为是由于(i)柱状结构的形状转变，以及（ii）多晶柱内和周围氧的偏析和氧化物的形成影响了反畴和畴壁的成核和钉住。通常，在低氧流速下沉积的薄膜具有弯曲柱状结构，而在临界高氧流速以上，薄膜具有直斜柱状形态。
Some effects due to the introduction of oxygen during oblique deposition of CoNi films on both the magnetic properties and the columnar structure of the deposited film are described. A double-peak variation of the in-plane coercivity with the oxygen flow rate is proposed to be due to competing contributions from (i) a shape transition in the columnar structure, and (ii) the segregation of oxygen and formation of oxides in and around the polycrystalline columns influencing both the nucleation and pinning of reverse domains and domain walls. Typically, films deposited at a low-oxygen flow rate have a curved-columnar structure, whereas above a critical, high-oxygen flow rate, the films have a straight canted-columnar morphology.